A Fabrication Approach for Hybrid-Integrated Electrically Pumped VECSELs
نویسنده
چکیده
Unlike a vertical-cavity surface-emitting laser (VCSEL), which comprises two highly reflecting distributed Bragg reflectors (DBRs), the extended cavity in VECSELs employs a third mirror. The fabrication of such a device requires a long process chain, including the patterning of the VCSEL structures, definition of the extended optical resonator, mirror coating and die bonding. While VCSELs have matured to be used in commonplace applications like optical computer mice necessitating volume production [1], products incorporating VECSELs are still rare.
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